Reprint from English language edition:
Micro-Nanorobotic Manipulation Systems and Their Applications
by Toshio Fukuda, Fumihito Arai and Masahiro Nakajima
Copyright ? Springer-Verlag Berlin Heidelberg 2013
Springer Berlin Heidelberg is a part of Springer Science+Business Media.
All Rights Reserved

Chapter 1
Introduction of Micro-Nanorobotic
Manipulation Systems
Technology has been moving toward greater control of the structure of matter for
millennia. Progress in science and technology over the past decades suggest the
feasibility of achieving thorough control of the molecular structure of matter. The
possibility to control the structure of matter atom by atom was first discussed by
Richard Feynman in 1959 seriously, which is now labeled "nanotechnology".
Feynman wrote in a prophetic article on miniaturization [11: "I am not afraid to
consider the final question as to whether, ultimately-in the great future-we can
arrange the atoms the way we want: the very atoms, all the way down !" He asserted
that "At the atomic level, we have new kinds of forces and new kinds of
possibilities, new kinds of effects. The problems of manufacture and reproduction
of materials will be quite different. The principles of physics, as far as I can see, do
not speak against the possibility of maneuvering things atom by atom."
The "great future" of Feynman began to be realized in the 1980s. Some of the
capabilities he dreamed of have been demonstrated, while others are being
developed. Although we are still far from having a general and reliable
nanotechnology, progress in the last two decades or so has been tremendous. As the
twenty-first century unfolds, the impact of nanotechnology on the health, wealth, and security of the world's people is expected to be at least as significant as the
combined influences in the 20th century of antibiotics, the integrated circuit, and
human-made polymers. Neal Lane stated in 1998, "If I were asked for an area of
science and engineering that will most likely produce the breakthroughs of
tomorrow, I would point to nanoscale science and engineering."[21 The great
scientific and technological opportunities provided by or potentially would be
provided by nanotechnology have stimulated extensive exploring of nano world
ever since and initiated exciting worldwide competition especially after the
publication of "National Nanotechnology Initiative" by U.S.A. government in 2000
[3].
Nanomanipulation is one of the most significant enabling technologies for
nanotechnology, and might finally be the core-most part of nanotechnology if
Drexler's machine-phase nanosystems based on self- replicative molecular
assembler via mechanosynthesis would be realized [4].
Since the discovery, carbon nanotubes (CNTs) [5] have been extensively
explored both theoretically and experimentally. The exceptional properties and broad potential applications of nanotubes make them become the most important
and promising materials for nanotechnology discovered by so far.
This dissertation focuses on nanorobotic manipulations of carbon nanotubes.
The main purpose is to provide an effective tool for the experimental exploration of
this typical mesoscopic material, and for the construction of nanosystems with this
exceptional nano building block. The long-term oriented aim is to develop a
universal nanosystem builder with the abilities of instrumentation, fabrication, and
assembly.
1.1 Background of Micro-Nanorobotic Manipulation Systems
Technological advancement on the top-down fabrication process, or micro
machining, provides nanometer structures. On the other hand, the bottom-up
fabrication process, or chemical synthesis such as self-assembly or super-molecule
techniques, also provides nanometer structures. In fact, both approaches reach
nanometer scale with the limitations of physical/chemical aspects at present. The
"Nanotechnology" has an important role on the combinations of the top-down and
bottom-up approaches. It is considered that the wide scale controlled devices from
atomic scale to meter scale will be realized in the near future [6] (Figure l. 1).
The essence of nanotechnology is the ability to work at these levels to generate
larger structures with fundamentally new molecular organization. Such materials
and systems can be rationally designed to exhibit novel and significantly improved
physical, chemical, and biological properties, phenomena, and processes because of
their size. When characteristic structural features are intermediate in extent between
isolated atoms and bulk materials, the objects often display physical attributes
substantially different from those displayed by either atoms or bulk materials.
Material Examples
10 mm
Pen, Tweezers...
Imm
Cell, Yarn...
100 Um
Hairs, Blood Capillary...
0 10ptm
Protein, Micro-Machine...
&ai lym
DNA, Carbon Nanotubes...
100 nm

Contents
1 Introduction ofMicro-Nanorobotic Manipulation Systems 1
1.1 Background ofMicro-Nanorobotic Manipulation Systems 2
1.1.2 What Is Micro to Nanotechnology? 4
1.1.3 What Is Micro-Nanorobotic Manipulation Systems? 4
1.2 Strategies and Related Works ofMicro-Nanorobotic Manipulation
1.2.3 Applicable Fields of Micro-Nanorobotic Manipulation
1.2.4 Related Works ofMicromanipulations 14
1.2.5 Related Works ofNanomanipulations 18
1.3 Application Fields of Micro-Nanorobotic Manipulation Systems 23
1.3.3 For System Cell Engineering 28
2 Physicsin Micro-Nano Scale 45
2.1 Scaling Effects in Micro-Nano Scale 45
2.2 Mechanics in Micro-Nano Scale 46
2.2.2 Elastic Properties in Micro-Nanometer Scale 47
2.3 Electronics in Micro-Nano Scale 47
2.3.1 Electrostatic Force 47
2.3.4 Field Emission Mechanism 49
2.3.5 0pticalDielectrophoresis 50 2.5 Surface Interaction in Micro-Nano Scale 53
2.5.1 Analysis oflntermolecular and Surface Forces 54
2.5.2 Picking Up by Applying Dielectrophoresis under Surface
2.5.3 Adhesion Force of Micro-Nano Fibers 56
2.6 Laser Trapping Mechanism 58
3 Related Technologies on Micro-Nanorobotic Manipulation Systems 61
3.1 Materials and Science in Micro-Nano Scale 61
3.1.4 HydrophilicfHydrophobicMaterial 69
3.2 Microscopes in Micro-Nano Scale 73
3.2.1 0ptical Microscopes 73
3.2.2 Scanning Probe Microscopes 77
3.2.3 Electron Microscope 78
3.3 Fabrication Techniques in Micro-Nano Scale 83
3.3.2 Electron-Beam-Induced Fabrication System 85
3.3.5 Self-AssemblyTechniques 90
3.4 Sensing and Actuation in Micro-Nano Scale 90
3.4.1 Sensing in Micro-Nano Scale 90
3.5 Control Techniques in Micro-Nano Scale 94
3.5.1 Master-Slave Control System for Micro-Nano
3.5.2 Control of Master-Slave Control System for Laser
3.6 Assembly Techniques in Micro-Nano Scale 98
3.6.1 2D Assembly Technique in Micro-Nano Scale 98
3.6.2 3D Assembly Technique in Micro-Nano Scale 99
4 Micromanipulation System under Optical Microscope 107
4.1 Biomicromanipulation Methods for On-Chip Cell Experiments 107
4.2 Multiple Trapping by Optical Tweezers 113 4.2.1 Time Shared Scanning (TSS) Laser Trapping System 113
4.2.2 Computer Generated Hologram (CGH) method 117
4.3 Configurations ofMicro-Fluidics Chips 120
4.4 Non-contact Manipulation with Micro-tool 122
4.4.1 Roles of Micro-tool for On-Chip Cell Experiment System 123
4.4.2 0n-Chip Cell Experiment System with Non-contact
Manipulation of Micro-tool 125
4.4.3 Reversible Injection Method of Microtool by Dielectrophoretic
4.5 Micro-tools for Lasermicromanipulations 129
5 Rotational Speed Control of Single Bacterial Flagellar Motor 137
5.1 Background of Rotational Speed Control of Single Bacterial Flagellar
5.1.1 Conventional Works 137
5.1.2 Principal ofFlagellar Motor 137
5.1.3 Research Goal ofMicro-Nanorobots Using Flagellar
5.1.4 Driving Force Generated by Flagellum 139
5.2 Experimental Set-Up for Rotational Speed Control of Single
Bacterial Flagellar Motor 140
5.2.1 Switching Discharge between Micro-Nano Dual Pipettes 141
5.2.2 Simultaneous Discharge from Micro-Nano Dual Pipettes 144
5.2.3 Upgrade ofMicro-Nano Dual Pipettes System 144
5.2.4 Concept of Simultaneous Discharge 145
5.2.5 Automation ofVoltage Control and Synchronization
5.2.7 Rotational Speed Control of Bacterial Flagellar Motor 147
5.3 Rotational Speed Measurement of Flagellar Motor 148
5.3.2 Experimental Set-Up for Rotational Speed Measurement
o
5.3.3 Experimental Results of Rotational Speed Measurement
o
5.3.4 Discussions of Rotational Speed Measurement of Flagellar
5.4 Steady-State Control of Rotational Speed of Flagellar Motor 155
5.4.1 Experimental Set-up for Steady-State Control of Rotational
5.4.2 Experimental Results of Steady-State Control of Rotational
5.4.3 Estimation of Torque Generated by Flagellar Motor 158 6 Nanomanipulation System under Electron Microscope 163
6.1 Configuration ofNanomanipulation System 163
6.2 Nanorobotic Manipulation System Inside SEM 163
6.2.1 Design of Nanorobotic Manipulation System Inside SEM 163
6.2.2 Link Coordination of Nanorobotic Manipulation System Inside
6.2.3 Configuration of Control System of Nanorobotic Manipulation
System Inside SEM 171
6.3 Hybrid Nanorobotic Manipulation System Inside SEM/TEM 172
6.4 Nanorobotic Manipulation System Inside E-SEM 181
6.4.1 Design ofNanorobotic Manipulation Systemlnside
6.4.2 Link Coordination of Nanorobotic Manipulation System Inside
6.5 HybridMicroscope 185
6.6 Nano-tool Exchanger System under Hybrid Microscope 188
6.7 Automation of Nanorobotic Manipulation System Inside E-SEM 190
7 Measurement/Manipulation/Assembly of Carbon Nanotubes under
7.1 Application Fields ofNanomanipulation System under
7.2 Mechanical Evaluation of Carbon Nanotubes 197
7.3 Deposition Using Carbon Nanotube Emitters 201
7.4 3D Assembly of Carbon Nanotube 220
7.5 Nano-actuator Using Telescoping Carbon Nanotube 230
8 BiOlOgical CeIIManipulation/Measurement/Analysis under
E-SEM 243
8.1 Application Fields of Nano-manipulation System under E-SEM 243
8.2 Single Cell Nano-surgery System Using Nano-tools 243
8.3 0bservation ofBiological Cells by E-SEM 243
8.3.1 Preparing the W303 Wild-Type Yeast Cells for E-SEM
8.3.2 Qualitative Evaluation of Cell Survivability of W303
Cells under E-SEM Observation 245
8.4 Mechanical Property Characterization of Single Cell Using
8.4.1 Nanoindentation Process 246
8.4.2 Force Measurement Using AFM Cantilever 248
8.4.3 Determination ofthe Cantilever Deflection via Angular 8.4.4 Calibration of the

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